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A silicon micromachined four-pole linear phase filter

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2 Author(s)
Harle, L. ; Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA ; Katehi, L.P.B.

A 27-GHz four-pole linear phase filter constructed of micromachined cavities in silicon is presented. The structure of the filter consists of four side-by-side horizontally oriented cavities, which are coupled in turn by evanescent waveguide sections with three direct-couplings and one cross-coupling between the first and fourth cavity resonators. The cavities are reduced-height waveguide resonators and are fed by microstrip lines through slot apertures. A time-domain tuning technique is employed to improve the efficiency of the design synthesis. The measured results are presented and compared to those predicted by a finite-element-method model. The simulated filter response has a bandwidth of 2.2% centered at 27.480 GHz with an insertion loss of 1.4 dB at that frequency. The measured performance indicates a 1.9% bandwidth centered at 27.604 GHz with a deembedded insertion loss of 1.6 dB at that frequency and a measured unloaded Q of 1465.

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:52 ,  Issue: 6 )