Cart (Loading....) | Create Account
Close category search window
 

Design of CMOS MEMS based on mechanical resonators using a RF simulation approach

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Latorre, L. ; Lab. d''Informatique de Robotique et de Microelectronique de Montpellier, France ; Beroulle, V. ; Nouet, P.

This paper, which is mostly tutorial in nature, deals with the design of CMOS microelectromechanical systems MEMS using standard microelectronic computer-aided design tools. The proposed case study is an on-chip spectrum analyzer with an electronic mixer and a mechanical filter. Based on both analytical modeling and characterization, the filter is described using an analog hardware description language. System level simulations are then performed using a recently released simulation tool that offer new possibilities regarding the analysis of multidomain, multifrequency designs. Presented results include periodic steady state determination, small-signal analysis and noise investigation. The simulations demonstrate the ability of the proposed system to identify the harmonics of a 50-Hz square-wave signal, owing to the selectivity of the mechanical filter.

Published in:

Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on  (Volume:23 ,  Issue: 6 )

Date of Publication:

June 2004

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.