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Microelectrode array fabrication by electrical discharge machining and chemical etching

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5 Author(s)
Fofonoff, T.A. ; Dept. of Mech. Eng., Massachusetts Inst. of Technol., Cambridge, MA, USA ; Martel, S.M. ; Hatsopoulos, N.G. ; Donoghue, J.P.
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Wire electrical discharge machining (EDM), with a complementary chemical etching process, is explored and assessed as a method for developing microelectrode array assemblies for intracortically recording brain activity. Assembly processes based on these methods are highlighted, and results showing neural activity successfully recorded from the brain of a mouse using an EDM-based device are presented. Several structures relevant to the fabrication of microelectrode arrays are also offered in order to demonstrate the capabilities of EDM.

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Biomedical Engineering, IEEE Transactions on  (Volume:51 ,  Issue: 6 )