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Tuning of photonic crystal waveguide microcavity by thermooptic effect

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2 Author(s)
H. M. H. Chong ; Optoelectronics Res. Group, Univ. of Glasgow, UK ; R. M. De La Rue

A tunable photonic crystal microcavity with in-filling holes has been experimentally realized by using the thermooptic effect in silicon-on-insulator waveguide at λ=1530 nm. The device was fabricated by reactive ion etching through the silicon core layer for high vertical confinement. A thin film heater has been integrated onto the microcavity. A small change in temperature (and consequent change in refractive index) was sufficient to cause an observable resonance shift. A resonance shift of 5 nm was achieved when the heater was switched on to a current of 1.2 mA (with switching power of about 9 mW).

Published in:

IEEE Photonics Technology Letters  (Volume:16 ,  Issue: 6 )