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A prealigned process of integrating optical waveguides with microfluidic devices

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3 Author(s)
Lien, Victor ; Electr. & Comput. Eng. Dept., Univ. of California, La Jolla, CA, USA ; Berdichevsky, Y. ; Yu-Hwa Lo

We present a novel technology to monolithically integrate buried heterostructure waveguides with microfluidic channels in a prealigned manner. The fabrication process produced sealed microfluidic channels, low-loss waveguides, and excellent waveguide-channel alignment. The resultant device allows efficient optical coupling between the channels and the waveguides. Thus, the waveguides can both deliver the optical power and collect the emitted light.

Published in:

Photonics Technology Letters, IEEE  (Volume:16 ,  Issue: 6 )

Date of Publication:

June 2004

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