Cart (Loading....) | Create Account
Close category search window
 

An oxidized porous silicon (OPS) microlens implemented on thick OPS membrane for a silicon-based optoelectronic-multichip module (OE-MCM)

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Man-Lyun Ha ; Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Daejon, South Korea ; Jae-Ho Kim ; Sung-Ku Yeo ; Young-Se Kwon

Using the silicon bulk micromachining and selectively oxidized porous silicon (SOPS) technology, a silicon dioxide microlens was implemented on thick oxidized porous silicon (OPS) membrane. Because the surface of microlens was the interface of OPS-Si, the surface roughness of lens was directly affected by the anodization current density, substrate resistivity, and high-frequency percent in ethanol-contained electrolyte. In the SOPS technology, the porous silicon layer (PSL) was formed under the mask layer with its horizontal-vertical ratio of about 0.8. During the formation of lens part, Si3N4 mask layer was also etched with constant etch rate and the PSL formed on the masked area was used as a membrane supporter. The initial open area and the thickness of the mask layer controlled the focal length of the OPS lens and its range was from 20 to 110 μm. By using these microlenses, a new silicon-based optoelectronic-multichip module configuration was proposed.

Published in:

Photonics Technology Letters, IEEE  (Volume:16 ,  Issue: 6 )

Date of Publication:

June 2004

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.