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A thermally tunable GaAlAs-GaAs micromachined optical filter with submillisecond tuning speed

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5 Author(s)
Amano, T. ; Microsystem Res. Center, Tokyo Inst. of Technol., Yokohama, Japan ; Hino, T. ; Koyama, F. ; Arai, M.
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We fabricated a GaAlAs-GaAs thermally tunable vertical-cavity filter with a thermal strain control layer and heating element on a micromachined cantilever structure. We achieved a large negative temperature dependence of -0.79 nm/K for the vertical-cavity filter by loading a GaAs strain control layer. The tuning voltage is as low as 4.9 V for wavelength tuning of 18.1 nm. We examined the dynamic response of the thermally tunable micromachined GaAlAs-GaAs filter, exhibiting both rise time and fall time of below 100 μs.

Published in:

Photonics Technology Letters, IEEE  (Volume:16 ,  Issue: 6 )