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Micro-temperature sensor array with thin-film thermocouples

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2 Author(s)
J. -J. Park ; Dept. of Mech. Eng., Univ. of Washington, WA, USA ; M. Taya

A micro-temperature sensor array with thin-film thermocouples (TFTCs) is developed. The TFTCs are made with T-type (copper-constantan) thermocouples to measure chip temperature distribution of electronic packaging. The sensor array of 150 nm thickness has 10×10 junctions within a 9×9 mm area.

Published in:

Electronics Letters  (Volume:40 ,  Issue: 10 )