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Application of conformal mapping approximation techniques: parallel conductors of finite dimensions

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5 Author(s)
Pesonen, N. ; MEMS Sensors Group, Nat. Res. Center of Finland, Finland ; Kahn, W.K. ; Allen, Richard A. ; Cresswell, Michael W.
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This paper describes a novel approach to the application of conformal mapping to capacitance evaluation. A particular structure composed of an array of identical lines and located below a conductive plate is studied. Results show the application of conformal mapping can reduce computing time when using three-dimensional electrostatic modeling and it can be the basis of algorithms of practical applications, especially in the semiconductor industry.

Published in:

Instrumentation and Measurement, IEEE Transactions on  (Volume:53 ,  Issue: 3 )

Date of Publication:

June 2004

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