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Browse Conference Publications > Lasers and Electro-Optics, 20 ... Help

Optical MEMS fabrication, scaling and design of microoptical devices and systems

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1 Author(s)
Solgaard, O. ; Edward L. Ginzton Lab., Stanford Univ., CA, USA

MEMS technology offer substantial advantages for optical systems: Tight dimensional tolerances allow accurate control of optical fields, MEMS actuators provide tunability, parallel processing leads to low cost, and miniaturization simplifies packaging and installation. Cost-effective use of microfabrication technology requires miniaturization, however, so optical MEMS presents unique challenges in design and scaling.

Published in:
Lasers and Electro-Optics, 2003. CLEO '03. Conference on

Date of Conference: 6-6 June 2003

Print ISBN:
1-55752-748-2
INSPEC Accession Number:
8424351
Conference Location :
Baltimore, MD, USA
Product Type:
Conference Publications

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