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The effects of ceramic thin film coating on friction surfaces for surface acoustic wave (SAW) linear motor were estimated. By using a slider coated with SiC, the maximum no-load speed of the slider was approximately 1.1 m/s, which was equivalent to the horizontal vibration velocity of the Rayleigh wave at the driving voltage of 125 V0-p. Furthermore, by using a slider coated with HA-DLC and a stator coated with Al2O3, the no-load speed and the output force of the slider were approximately 1.5 m/s and 3 N at 190 V0-p. It was shown that the driving characteristics were improved by ceramic thin film coating with the proper materials such as SiC, HA-DLC and Al2O3 on friction surfaces.