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Fabrication of multi-functional integrated liquid sensors using MEMS and film-bonding technology

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5 Author(s)
Kaneshiro, C. ; Dept. of Electr. & Electr. Eng., Kanagawa Inst. of Technol., Atsugi, Japan ; Koh, K. ; Hohkawa, K. ; Yamamura, A.
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In this paper, we present the results of a basic study on fabrication technology of integrated sensors circuit, in which the various sensors based on the mass loading effect, a conductive change, and photo-luminescence methods are integrated on piezoelectric substrate. We propose a design of micro-pump with a simple structure for low cost. Also, the experimental result shows that its controllability of liquid flux is very high sensitive. Moreover, we adopt Au-IDT electrodes with immobilized oxidases for sensing glucose concentration.

Published in:

Ultrasonics, 2003 IEEE Symposium on  (Volume:2 )

Date of Conference:

5-8 Oct. 2003

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