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Collapsed regime operation of capacitive micromachined ultrasonic transducers based on wafer-bonding technique

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7 Author(s)
Huang, Y. ; Edward L. Ginzton Lab., Standford Univ., Stanford, CA, USA ; Haeggstrom, E. ; Bayram, B. ; Zhuang, Z.
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We report experimental results from collapsed regime operation of the capacitive micromachined ultrasonic transducers (cMUTs) fabricated by a wafer bonding technique. The results show that a cMUT operating in the collapsed regime produces a maximal output pressure higher than a cMUT operating in the precollapse regime at 90% of its collapse voltage, 1.79kPa/V vs. 9.72 kPa/V at 2.3 MHz. in collapsed regime operation the fractional bandwidth (pulse-echo) is increased compared to that obtained in precollapsed regime operation 140% vs 83% with a bias 90% of the collapse voltage. Characterization of 1-D cMUT arrays operating in oil was done by ultrasonic pulse echo and pitch catch measurements.

Published in:

Ultrasonics, 2003 IEEE Symposium on  (Volume:2 )

Date of Conference:

5-8 Oct. 2003

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