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Plane-wave diffraction by a finite array of two-dimensional dielectric-loaded cavity-backed slots on a common ground plane is investigated for oblique incidence and arbitrary polarization. The governing system of coupled singular integral/integrodifferential equations is discretized using moment-method-oriented direct singular integral equation methods. Treating all singular integrals analytically via rapidly converging algorithms leads to numerically stable and efficient analytical expressions for all matrix elements. As a result, no numerical integration is required to compute these elements. Several numerical examples are presented to validate the algorithm and illustrate its convergence characteristics. Results are also presented that reveal the possibility of controlling the absorption efficiency by suitably selecting several geometrical and physical parameters of the structure.