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Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

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11 Author(s)
Dumon, P. ; Dept. of Inf. Technol., Ghent Univ.-IMEC, Gent, Belgium ; Bogaerts, W. ; Wiaux, V. ; Wouters, J.
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We demonstrate single-mode photonic wires in silicon-on-insulator with propagation loss as low as 2.4 dB/cm, fabricated with deep ultraviolet lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and low add-drop crosstalk.

Published in:

Photonics Technology Letters, IEEE  (Volume:16 ,  Issue: 5 )