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Robust, large-deflection, in-plane thermal polymer V-shaped actuators

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5 Author(s)
Haasl, S. ; Dept. of Signals Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden ; Griss, P. ; Sohlstrom, H. ; Kalvesten, E.
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We present the design, fabrication and characteristics of the first in-plane V-shaped polymer actuator. Several different designs are evaluated and compared with each other. The intended application for this actuator is optical component alignment.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference:

2004