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Low-voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism

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3 Author(s)
Kerwin Wang ; Dept. of Electr. Eng., Washington Univ., Seattle, WA, USA ; M. J. Sinclair ; K. F. Bohringer

This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial tilting angles of the mirrors range between 6.5°-13.5°. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4 mtorr).

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference:

2004