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This paper describes the charging method of a micro-patterned electret for a high power electrostatic motor. By applying contact electrification using mercury to electret charging, charging to 5 μm-wide micro-patterned electret was achieved. But, 0.9 μm-wide edges of the electret is not charged due to discharge at the edges. Using this method, a silicon-dioxide electret with 0.5 μm thickness was charged up to a charge density of about -100 V/μmSiO2 with fair repeatability.
Date of Conference: 2004