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Fabrication of directed nano wire networks through self-assembly

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3 Author(s)
Alaca, E. ; Dept. of Mech. & Ind. Eng., Illinois Univ., Urbana, IL, USA ; Sehitoglu, Huseyin ; Saif, Taher

We present a major development in our novel, self-assembly-based nano wire fabrication method. When it was first reported in MEMS 2003, the method could successfully produce a network of nano wires that are 50 nm in width and hundreds of microns long despite little control on the global shape of the network itself. However, the recent development enables us to impose very complicated shapes on the nano wire network by assigning points of wire initiation and termination by means of simple lithography. Hence, 1) the number, and 2) the direction of nano wires can be dictated.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference:

2004

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