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New concept and fabrication of surface micro machined vertical structure

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6 Author(s)

Technique to pop up a plate vertically using the technique for IC manufacturing process is applicable to various devices in both RF and optical MEMS. This paper introduces novel technique using "Turning-structured Bi-material Beams" for fabrication of a vertical structure and explains success in fabrication of a vertical structure by applying the technique.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference:

2004