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This paper deals with the fatigue phenomenon of microstructures which is scanned through the dynamic response of polycrystalline structural layers during operation. A predictive modeling of the fatigue phenomenon has been determined based on experimental results obtained by using M-Tests. First, we present the fabrication process and simulation results. Next, cyclic actuation has been performed and two different characterization methods have been used: pull-in voltage measurement and mechanical determination of the stiffness with an Atomic Force Microscope. A description of the fatigue phenomenon is proposed and, from experimental results, a predictive modeling has been built and compared to new characterization results in order to validate it. This modeling allows predicting the evolution of clamped-clamped beam stiffness vs. the number of operations.
Date of Conference: 2004