High fill-factor two-axis analog micromirror array for 1/spl times/N/sup 2/ wavelength-selective switches

We report on a two-axis analog micromirror array with high fill factor (96%) and large mechanical scan angles (/spl plusmn/4.4/spl deg/ and /spl plusmn/3.4/spl deg/). To our knowledge, this is the highest linear fill factor ever reported for two-axis analog micromirror arrays. A 1/spl times/14 wavelength-selective switch (WSS) was also demonstrated using the mirror array. This is the largest number of port count ever reported for WSS. The fiber-to-fiber insertion loss is 8.2 dB. Switching of <2 msec has been achieved.