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A wide range linearly-tunable optical filter using magnetic actuation

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4 Author(s)
Hyung-Kew Lee ; Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., South Korea ; Kyu-Sang Kim ; Il-Joo Cho ; Euisik Yoon

In this paper, we have proposed and demonstrated a widely tunable optical filter using magnetic actuation. We have fabricated and tested three types of spring structures: straight bar, corrugation, and meander types. We have achieved linear displacement over 1 μm due to bi-directional nature of magnetic actuation. From this, we have acquired a wide linear tuning range over 200 nm in wavelength which is the widest ever reported. The fabricated tunable filter consumes a maximum static power less than 25 μW with an external magnetic field of 0.28T.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

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