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A scanning mirror with extremely high resonance frequency up to 0.51 MHz using both torsion and buckling springs

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7 Author(s)
Xiaoyu Mi, ; Fujitsu Labs. Ltd., Akashi, Japan ; Tsuboi, O. ; Okuda, H. ; Soneda, H.
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This paper reports about a single-crystalline Si mirror of around a millimeter in size used for laser beam scanning in an optical measurement system in a vacuum. The miniature mirror is capable of scanning at an extremely high-speed of up to 0.5 MHz, and uses a new rotation vibration mechanism involving both torsion and buckling springs. The mirror is fabricated using deep reactive-ion-etch (DRIE) and anodic bonding technologies. The efficacy of the new mechanism is demonstrated by measuring two fabricated scanning mirrors, one having a 0.15 MHz resonance frequency and the other a 0.51 MHz resonance frequency. This paper will explain the concept, fabrication process and discuss the experimental results.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference:

2004