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A full-time accelerated vertical comb-driven micromirror for high speed 30-degree scanning

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7 Author(s)
Tsuboi, O. ; Fujitsu Labs. Ltd., Akashi, Japan ; Mi, X. ; Kouma, N. ; Okuda, H.
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This paper presents a new structure and driving method for a vertical comb-driven micromirror which enables full-time acceleration and mechanical 30-degree scanning with a 4-mm long mirror. Its optimal application is as a scanning mirror for laser beam printers, replacing polygon mirrors which have technical limits in relation to scanning speed.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference:

2004