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Iron disilicide based thermoelectric materials with the designed compositions of FeSi2, Fe0.90Mn0.06Al0.04Si2, and FeAl0.05Si2 were prepared by rapid solidification, nitriding treatment and hot uniaxial pressing. Samples with a dominant β-FeSi2 phase and a small amount of residual α and ε phases were obtained after annealing at 800°C for 20 hours. Transport property measurements showed that the Seebeck coefficients were markedly enhanced by nitriding for all samples. Both the electrical and the thermal conductivities were decreased by nitriding, but more strongly for Al-doped samples than for the samples with Al and Mn double doping. As a total effect, the figure of merit was significantly increased by either Al single doping or Mn and Al double doping. It shows that nitriding is more effective for double doping. The maximum figure of merit of Z=1.63×10-4K-1 at 573°C was obtained for nitrided Fe0.90Mn0.06Al0.04Si2.