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To achieve low-cost and high-precision operational requirements in microelectronics fabrication industry, a new microlinear switched-reluctance motor (μLSRM) design that being integrated with the microelectromechanical system (MEMS) processing scheme has been investigated. With the degraded property of magnetic material after electroplating process and the geometric constraints of MEMS fabricating technology all being taken into account, the motor generated propulsive/normal force ratios at various pole shapes and winding excitation levels have been analyzed by three-dimensional finite element analysis. Results showed that the design objectives could be successfully fulfilled by the proposed μLSRM structure.
Date of Publication: March 2004