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Finite-element simulation of micro-electromechanical systems (MEMS) by strongly coupled electromechanical transducers

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3 Author(s)
Gyimesi, I. ; ANSYS Inc., Canonsburg, PA, USA ; Avdeev, I. ; Ostergaard, D.

The paper introduces a new methodology for the strongly coupled electrostatic-structural finite-element (FE) simulation of micro-electromechanical systems (MEMS) using a novel distributed electromechanical transducer that is compatible with regular solid and lumped FE. Its application range is as general as the sequentially coupled procedures, but converges more robustly with about an order of magnitude smaller number of iteration. The new transducers apply automatic internal mesh morphing. The morphing allows the mesh density to be different across the domain permitting accurate modeling of fringing effects.

Published in:

Magnetics, IEEE Transactions on  (Volume:40 ,  Issue: 2 )

Date of Publication:

March 2004

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