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MEMS tilt-mirror spatial light modulator for a dynamic spectral equalizer

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6 Author(s)
Bernstein, Jonathan J. ; Corning IntelliSense, Wilmington, MA, USA ; Dokmeci, Mehmet R. ; Kirkos, G. ; Osenar, A.B.
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This paper presents a linear array of tilting mirrors used to attenuate the various wavelengths in a DWDM optical signal. Attenuation of 21 dB at snap-down was achieved by the tilting mirrors, substituting for a liquid crystal spatial light modulator (SLM) in a commercial dynamic spectral equalizer (DSE). Linear fill factor of 92% was achieved, allowing closely spaced wavelength channels to be individually attenuated. A two layer polysilicon process with a thick epi-poly mirror was used to fabricate the SLM. Initial mirrors had a radius of curvature of 25 cm. A novel accelerated HF-H2SO4 etch allowed 100 μm wide mirrors to be undercut in 12 min with no etch release holes.

Published in:

Microelectromechanical Systems, Journal of  (Volume:13 ,  Issue: 2 )