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We report on a microelectromechanical-systems (MEMS)-based 1×N wavelength-selective switch (WSS) with excellent open-loop stability and repeatability. The optical power fluctuation of the WSS is <±0.0035 dB over a 3.5-h period. The variation of optical power during 30 ON-OFF switching periods is <±0.0026 dB. Experiments were also performed on the analog MEMS mirror. The stability and repeatability are ±0.00085° and ±0.0013°, respectively.