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Linear and non-linear effects of n-silicon: theory and simulation

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2 Author(s)
Tellier, C.R. ; LCEP., ENSMM, Besancon, France ; Durand, S.

In this paper new theoretical expressions are derived for the reference shear LPC and for all reference NLPC related to shear stresses that allow us to characterize the influence of temperature and of doping. A simulator PIEZOSIM was developed where computations of primed LPC and NLPC involve reference piezoresistance coefficients related to uniaxial and/or shear stresses. This simulator seems to be a convenient tool to investigate advantages of piezoresistive elements with special orientations.

Published in:

Sensors, 2003. Proceedings of IEEE  (Volume:2 )

Date of Conference:

22-24 Oct. 2003