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Microfluidic genetic and amino acid analysis using an integrated a-Si:H detector

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7 Author(s)
Kamei, T. ; Nanoelectronics Res. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol., Ibaraki, Japan ; Scherer, J.R. ; Paegel, B.M. ; Lagally, E.T.
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Hydrogenated amorphous silicon (a-Si:H) PIN photodiodes are used as fluorescence detectors for microfluidic biochemical and chemical analysis devices. A hybrid- integrated detector consisting of a half-ball lens, a ZnS/YF3 multilayer optical interference filter with a pinhole, and an annular a-Si:H photodiode is developed that allows the laser excitation to pass up through the central aperture in the photodiode. Using this integrated device, the limit of detection for fluorescein flowing in a 50-μm deep channel is 17 nM (S/N = 3). Furthermore, analysis of PCR amplicons generated from Staphylococcus aureus and chiral analysis of glutamic acid are successfully demonstrated. The a-Si:H detector exhibits high sensitivity at the emission wavelengths of commonly used fluorescent dyes and is readily microfabricated and integrated at low cost making it ideal for portable microfluidic bioanalyzers.

Published in:

Sensors, 2003. Proceedings of IEEE  (Volume:2 )

Date of Conference:

22-24 Oct. 2003