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Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications

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5 Author(s)
Kaajakari, V. ; VTT Inf. Technol., Espoo, Finland ; Mattila, T. ; Oja, A. ; Kiihamaki, J.
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A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 000) and high maximum drive level (P= 0.12 mW at the hysteresis limit) is demonstrated. The prototype resonator is fabricated of single-crystal silicon by reactive ion etching of a silicon-on-insulator wafer. A demonstration oscillator based on the new resonator shows single-sideband phase noise of -138 dBc/Hz at 1 kHz offset from the carrier.

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Electron Device Letters, IEEE  (Volume:25 ,  Issue: 4 )