Skip to Main Content
Growth of single-walled carbon nanotubes (SWNTs) via a chemical vapor deposition technique catalyzed by a thin Al/Ni stack is presented. Catalyst islands are defined by lithography, thin film evaporation and lift off technique. The process is fully compatible with conventional micro- and nanolithography techniques. Micrometer size semiconducting SWNT devices have been used to explore field-effect properties of the nanotubes at room temperature while smaller length semiconducting SWNT islands are used to study single-electron charging effects at low temperatures.