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Field-effect and single-electron transistors based on single-walled carbon nanotubes catalyzed by Al/Ni thin films

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4 Author(s)
Amlani, Islamshah ; Phys. Sci. Lab., Motorola Labs., Tempe, AZ, USA ; Zhang, R. ; Tresek, John ; Tsui, Raymond K.

Growth of single-walled carbon nanotubes (SWNTs) via a chemical vapor deposition technique catalyzed by a thin Al/Ni stack is presented. Catalyst islands are defined by lithography, thin film evaporation and lift off technique. The process is fully compatible with conventional micro- and nanolithography techniques. Micrometer size semiconducting SWNT devices have been used to explore field-effect properties of the nanotubes at room temperature while smaller length semiconducting SWNT islands are used to study single-electron charging effects at low temperatures.

Published in:

Nanotechnology, IEEE Transactions on  (Volume:3 ,  Issue: 1 )

Date of Publication:

March 2004

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