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Design and fabrication of the detector technology for SCUBA-2

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15 Author(s)
Walton, A.J. ; Scottish Microelectron. Centre, Univ. of Edinburgh, UK ; Parkes, W. ; Terry, J.G. ; Dunare, C.
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The design and fabrication is described of the prototype IR detector for the SCUBA-2 80×80 pixel array (Submillimetre Common User Bolometer Array), which is to be mounted on the James Clerk Maxwell Telescope in Hawaii. The detector technology is based on silicon micromachining, with transition edge sensors (TES) being used to detect incoming radiation with wavelengths of 450 and 850 μm. Each TES is located on a λ/4 silicon brick suspended on a silicon nitride membrane and supported by a silicon micromachined waffle. Low-temperature indium bump bonding connects each TES to a SQUID multiplexer chip. The paper details the design considerations and the technology used to fabricate the detector wafer.

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Science, Measurement and Technology, IEE Proceedings -  (Volume:151 ,  Issue: 2 )