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Characterization of TiO2/SiO2 hybrid sol-gel glass and its use for fabrication of micro-optical elements

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5 Author(s)
Weixing Yu ; Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore ; Yuan, X.-C. ; Ngo, N.Q. ; Cheong, W.C.
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We demonstrated fabrication of micro-optical elements in a TiO2/SiO2 hybrid sol-gel glass with different facilities including HEBS gray scale mask, laser direct writer and e-beam lithography. With different facility, we first calibrated this material and then designed and fabricated micro-optical elements according to calibration result. Micro-optical elements including blazed gratings and microlenses were fabricated successfully.

Published in:

Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on  (Volume:2 )

Date of Conference:

15-19 Dec. 2003