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Ferroelectric domain and surface engineering of a near-stoichiometric LiNbO3 crystal was investigated by using a scanning force microscope. The single crystal LiNbO3 (with 1% MgO doping) was grown by the double-crucible Czochralski method. The LiNbO3 crystals fixed on metal substrates were polished to a thickness of ∼5 μm. The domain structures were patterned in the LiNbO3 samples, where the domains were inverted by scanning with the cantilever on the sample while applying voltages. In addition, the negatively polarized surfaces in the patterns were preferentially etched in HF solution. As a result, surface structures with arbitrary shape on the samples were fabricated.