Cart (Loading....) | Create Account
Close category search window
 

SECAM: a supervisory equipment control application model for integrated semiconductor manufacturing equipment

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Jin-Hwan Lee ; Hyundai Information Technol. Ltd., South Korea ; Tae-Eog Lee

This paper describes SECAM (Supervisory Equipment Control Application Model), an object-oriented application prototype for SECs (supervisory equipment controller) for integrated semiconductor manufacturing equipment based on a high-level fieldbus PROFIBUS-FMS. It also features a layered architecture based on some key objects including service objects (SOs), command objects, and virtual control device (VCD) objects, which facilitate complex supervisory control application design and implementation based on highlevel fieldbus services. The proposed approach is demonstrated for a CTC for semiconductor manufacturing.

Published in:

Robotics & Automation Magazine, IEEE  (Volume:11 ,  Issue: 1 )

Date of Publication:

Mar 2004

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.