Cart (Loading....) | Create Account
Close category search window
 

Essential SMSs: developing a service management scheme for semiconductor factory management systems

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Fan-Tien Cheng ; Chinese Inst. of Autom., China ; Haw-Ching Yang ; Chia-Ying Tsai

A semiconductor factory contains hundreds of pieces of equipment. More reliable service by equipment managers is required to increase the utilization of equipment and improve product quality and yield. Therefore, developing a reliable service management scheme (SMS) for semiconductor factory management systems is essential. This study presents an SMS that applies Jini Technology and uses the design by contract technologies. The SMS has error-detecting and function-replacing capabilities. The SMS detects the malfunctioning of an equipment manager (service) and sends an event notice to the factory manager. The GEV in the SMS archives the credit values of all of the equipment managers so that the factory manager can select better equipment managers for service by checking their credit values. The illustrative example and the evaluation of the reliability improvement reveal that the proposed SMS provides an efficient, reliable, fault tolerant, and cost-effective mechanism for semiconductor factory management systems. Lastly, this illustrative example is successfully implemented and demonstrated and the core technology of SMS is transferred to and commercialized by Charming Systems Corporation.

Published in:

Robotics & Automation Magazine, IEEE  (Volume:11 ,  Issue: 1 )

Date of Publication:

Mar 2004

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.