By Topic

An algorithm to convert wafer to calendar-based preventive maintenance schedules for semiconductor manufacturing systems

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Ramírez-Hernández, J.A. ; Dept. of Electr. & Comput. Eng. & Comput. Sci., Cincinnati Univ., OH, USA ; Fernandez-Gaucherand, E.

The work presented here is related to the area of optimal preventive maintenance (PM) scheduling in semiconductor manufacturing systems. Specifically, we develop models and algorithms to convert PM task schedules based on the count of wafers processed into equivalent calendar PM schedules. These equivalent calendar-based tasks can then be used within an optimization algorithm for PM scheduling. We propose a discrete mathematical model and an algorithm to convert from wafer-count targets into equivalent calendar dates. An extension of this model and algorithm is presented to perform conversions of other types of PM's, such as those based on processing time or energy spent, into equivalent calendar-based PM's.

Published in:

Decision and Control, 2003. Proceedings. 42nd IEEE Conference on  (Volume:6 )

Date of Conference:

9-12 Dec. 2003