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Optical MEMS switch control and packaging

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7 Author(s)
H. Cai ; Inst. for Infocomm Res., Singapore, Singapore ; J. H. Wu ; L. J ; X. M. Zhang
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A MEMS switch which is packaged with electronic control modules has been developed and is presented in this paper. The switch consists of a comb-drive actuator and a micro-mirror which is interposed between two input/output fibers. All these are combined with the electronic control system. The main function of the MEMS switch is to control the optical path connection. It also provides the on-state and off-state function. The optical switch which uses proportional integral derivative (PID) control has a quicker switching time of 0.31 ms. The insertion loss is 1.2 dB at 1550 nm wavelength. This optical MEMS switch, which provides high reliability and stability of the set point tracking, is designed using the controller based on the experimental results.

Published in:

Electronics Packaging Technology, 2003 5th Conference (EPTC 2003)

Date of Conference:

10-12 Dec. 2003