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Process-Based Three-Dimensional Capacitance Simulation -- TRICEPS

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2 Author(s)
Uebbing, Reinhold H. ; Components Group, Siemens AG, Munich, West Germany ; Fukuma, M.

A novel three-dimensional (3-D) wiring capacitance simulator for VLSI circuits has been developed and successfully used in various applications, including DRAM-design. The simulator, TRICEPS, determines fully automatically 3-D total and coupling capacitances from mask and processing information. A novel simple input format, versatility, fast calculation time, and no need for any user interference make it a useful interactive development tool for dense VLSI circuits.

Published in:

Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on  (Volume:5 ,  Issue: 1 )