By Topic

Monte Carlo Methods in Defects Migration -- Spontaneous Annealing of Damage Induced by Ion Implantation

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Mazzone, A.M. ; Consiglio Nazionale Delle Ricerche, Istituto L.A.M.E.L., Bologna, Italy

This paper presents a simulation of the spontaneous annealing of damage generated during ion implantation and describes events such as clustering of defects of the same type and annihilation of defects of opposite type. The approach, which follows the line of the work by Metropolis et al., consists of generating a representative ensemble of points in the space of the configurational energy through random walks of the migrating species.

Published in:

Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on  (Volume:4 ,  Issue: 4 )