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Three-Dimensional Monte Carlo Simulations--Part II: Recoil Phenomena

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1 Author(s)
A. M. Mazzone ; CNR-Institute LAMEL, Bologna, Italy

A Monte Carlo method has been applied to recoil calculation. The spatial distribution of disorder has been analyzed in connection with parameters like ion mass, energy, and dose. Also implants in multilayer targets and the characteristic features of oxygen recoiling from a SiO 2 coating into Si underneath have been analyzed.

Published in:

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems  (Volume:4 ,  Issue: 1 )