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Monte Carlo methods are used to simulate implants. The results fall into two different groups. On one side, size-dependent effects due to the presence of the mask are analyzed and discussed. On the other side, physical mechanisms dependent on dose and energy, like channeling and transition crystal-amorphous, are briefly reviewed.
Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on (Volume:3 , Issue: 1 )
Date of Publication: January 1984