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Statistical Simulation of the IC Manufacturing Process

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2 Author(s)
Maly, W. ; Department of Electrical Engineering, Carnegie-Mellon University, Pittsburgh, PA, USA ; Strojwas, A.J.

Information about the random behavior of the IC manufacturing process can be applied for IC and process design tasks. In this paper a methodology for modeling random fluctuations of IC manufacturing process is proposed. A simulator of a complete bipolar manufacturing process called FABRICS, is described. A few applications illustrating advantages of the proposed statistical process modeling method are discussed.

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Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on  (Volume:1 ,  Issue: 3 )