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Experimental verification of a design methodology for torsion actuators based on a rapid pull-in solver

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2 Author(s)
O. Bochobza-Degani ; Electr. Eng. Dept., Technion-Israel Inst. of Technol., Haifa, Israel ; Y. Nemirovsky

In this work, an experimental and theoretical study of the effect of various geometrical parameters on the electromechanical response and pull-in parameters of torsion actuators is presented. A lumped two-degrees-of-freedom (L2DOF) pull-in model that takes into account the bending/torsion coupling, previously proposed for cantilever suspended actuators, is tailored for the torsion actuators under study. This model is shown to better capture the measured pull-in parameters than previously proposed lumped single-degree-of-freedom (L1DOF) models. The measurements were conducted on torsion actuators with various shapes, fabricated on silicon-on-insulator (SOI) wafers using deep reactive ion etching (DRIE) and flip-chip bonding. Furthermore, a novel rapid solver, for extracting the pull-in parameters of the L2DOF model of the torsion actuators, is proposed. The proposed solver is based on a Newton-Raphson scheme and the recently presented DIPIE algorithm and is shown to be ∼10 times faster than the prevalent voltage iterations based solvers. The rapid and more accurate pull-in extraction of the proposed approach renders it as a tool for extensive analysis and design optimization of torsion actuators.

Published in:

Journal of Microelectromechanical Systems  (Volume:13 ,  Issue: 1 )