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Application of nanoparticles dispersed polymer to micropowder blasting mask

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3 Author(s)
Yagyu, H. ; Mitsuboshi Belting Ltd., Kobe, Japan ; Hayashi, S. ; Tabata, O.

Improvements in micropowder blasting have been realized for rapid prototyping of channels in glass substrates. The technique presented in this study consists of laser patterning of Au nanoparticles dispersed polymer and micropowder blasting. The patterned polymer was utilized as a mask material for the subsequent mechanical removal of the glass by the micropowder blasting. Five different polymers were tested for the matrix material. Using a line and space mask pattern of 110 μm in width, fabricated channels were created in the glass with a maximum aspect ratio of 2.1. The validity of the micropowder blasting using Au nanoparticles dispersed polymer mask was confirmed; additionally, we demonstrated that the micropowder blasting technique with elevated polymer mask temperature was able to reduce erosion of the polymer mask.

Published in:

Microelectromechanical Systems, Journal of  (Volume:13 ,  Issue: 1 )