Referenced Items are not available for this document.
This paper describes a novel fabrication process for control electrodes which enables a micromirror array to be fabricated on LSIs. Electrodes designed to reduce drive voltage of the micromirror can be fabricated flexibly. Novel anti-sticking technology, in which a polyimide film is deposited only on control electrodes, prevents sticking between mirrors and electrodes. We fabricated a 100-ch micromirror array. The maximum rotational angle of 1° at 30 V was achieved using our developed technology.
Published in:
Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International
Date of Conference: 8-10 Dec. 2003
- Page(s):
- 39.5.1 - 39.5.4
- Print ISBN:
- 0-7803-7872-5
- INSPEC Accession Number:
- 7862405
- Digital Object Identifier :
- 10.1109/IEDM.2003.1269439
- Product Type:
- Conference Publications
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