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RF passive devices on Si with excellent performance close to ideal devices designed by electro-magnetic simulation

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14 Author(s)
A. Chin ; Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan ; K. T. Chan ; C. H. Huang ; C. Chen
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High quality RF inductors, very low loss and noise CPW and microstrip lines, advanced broad and narrow band filters, and ring resonators have been achieved on Si substrates, using an optimized proton implantation process. The RF performance up to 100 GHz is close to that for ideal devices designed by EM simulation for lossless substrates.

Published in:

Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International

Date of Conference:

8-10 Dec. 2003